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Light: Science & Applications[removed], e94; doi:[removed]lsa[removed] ß 2013 CIOMP. All rights reserved[removed]www.nature.com/lsa ORIGINAL ARTICLE
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Document Date: 2013-12-11 23:42:15

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City

Pister / A MEMS / Cairo / Taipei / Cancun / New York / Paris / Edwards / Silicon / /

Company

Goldsmith P. Quasioptical Systems / 2Si-Ware Systems / Perot / Wittig LC / Kubota / Kraft / Creative Commons / Micro Electro Mechanical Systems / Wiley-IEEE Press / Yu AB / SILVACO Inc. / Agilent / /

Country

Taiwan / Egypt / France / United States / Mexico / /

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Facility

Ain-Shams University / Carnegie Mellon University / /

IndustryTerm

fluorinated gas plasmas / gas plasmas / real 3D monolithic systems / intra chip / flatsurface devices / monolithic chip / metal sputtering technique / isotropic silicon etching technologies / /

Organization

Universite´ Paris-Est / US Federal Reserve / Ain-Shams University / Cairo / Carnegie Mellon University / Pittsburgh / Faculty of Eng / /

Person

Ben Bakir / Power Meter / Bell Syst / /

Position

Prime Minister / DC Optical fiber PM / /

ProvinceOrState

Kansas / California / /

Technology

semiconductor / laser / microelectromechanical systems technology / lasers / 3-D / Information Technology / dielectric / lithography / simulation / isotropic silicon etching technologies / photolithography / optical fiber / /

URL

www.nature.com/lsa / http /

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