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Semiconductor device fabrication / Chemistry / Ion source / Plasma / Inductively coupled plasma / Helicon / Electrodeless plasma excitation / Plasma source / Plasma physics / Physics / Plasma processing


llllllIllllllllllllllllllllllllllllllllllllllllllllllllllllllllllllllllllll US005587038A United States Patent[removed]]
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Document Date: 2013-09-24 14:58:06

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File Size: 1,19 MB

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Company

HP / /

Country

Japan / United States / /

Currency

pence / /

Facility

Princeton University / /

IndustryTerm

chemical / energy / /

Organization

Princeton University / /

Person

Bruce Breneman / Examiner / James E. Stevens / Joseph L. Cecchr / /

Position

Attorney / Assistant / /

ProvinceOrState

New Jersey / /

Technology

semiconductor / radiation / microwave / radio frequency / AV / dielectric / /

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