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AJA International ATC Orion-5 3 stage confocal RF Magnetron Sputtering System (Quick Start Guide) • Turn on the cooling water, compressed air, N2, and Argon gas • Main power on Vacuum off (in case of vacuum’s ru
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Document Date: 2015-04-28 16:32:41
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AJA International ATC Orion-5 3 stage confocal RF Magnetron Sputtering System (Quick Start Guide) • Turn on the cooling water, compressed air, N2, and Argon gas • Main power on Vacuum off (in case of vacuum’s ru