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Optics / Ellipsometry / Ultraviolet / Refractive index / Monochromator / Fourier transform infrared spectroscopy / Spectroscopy / Electromagnetic radiation / Measurement


Chapter 6: Materials Protection and Surface Technology Unique Test Facilities Spectroscopic Ellipsometry Set-ups for Spectral Determination of Optical and Dielectric Material Properties and Layer Thicknesses
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Document Date: 2015-02-04 09:11:39


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File Size: 334,71 KB

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Country

Germany / /

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IndustryTerm

energy loss function / layer-substrate systems / energy range / dielectric layer systems / /

Organization

Unique Test Facilities Chapter / /

Person

Uwe Beck / Andreas Hertwig / /

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Technology

laser / pdf / Dielectric / semiconductors / /

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