Modeling and experimental investigation of bubble entrapment for flow over topography during immersion lithography Holly B. Burnett*a, Alex C. Weia, Mohamed S. El-Morsia, Timothy A. Shedda, Gregory F. Nellisa, Chris Van

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Date: 2005-09-09 08:33:38		Modeling and experimental investigation of bubble entrapment for flow over topography during immersion lithography Holly B. Burnett*a, Alex C. Weia, Mohamed S. El-Morsia, Timothy A. Shedda, Gregory F. Nellisa, Chris Van Add to Reading List Source URL: sel.me.wisc.edu Download Document from Source Website File Size: 1,12 MB Share Document on Facebook