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City San Diego / Somerville / / Company Canon / IBM / SSPPM SRL / Distribution Unlimited / SBIR SRL / Nikon / ASML / Energy SRL / Company Science Research Laboratory Inc. / Cymer Inc. / Intel / Company Information Science Research Laboratory Inc. / Science Research Laboratory / Semiconductor Chips Technology / / Country United States / / Event Force Majeure / FDA Phase / M&A / / / IndustryTerm Venture capital / laser driver technology / technology results / technology needs / weapon device / technology demonstration / photolithography systems / electronic devices / technology development funds / lithographic tools / Conventional technology / large-scale commercial applications / semiconductor chips / energy / / Organization Army Research Office / Missile Defense Agency / Department of Defense / U.S. military / Department of Energy SRL / United States government / / Person Ward St Somerville / / / Position driver / President / / Product Public Release / / ProvinceOrState Massachusetts / / Technology semiconductor / Radiation / laser / government-developed technologies / semiconductors / Lasers / semiconductor chips / laser driver technology / DARPA-developed technology / microwave / photolithography / / URL www.srl.com / / SocialTag