Fluorocarbon-Based Passivation in STI Plasma Etching A.P. Milenina, R. Athimulama, M. Demanda, and B. Coenegrachtsb b Lam © IMECCONFIDENTIAL - Fluorotelomer alcohol - Document - PDFSEARCH.IO

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	Fluorocarbon-Based Passivation in STI Plasma Etching A.P. Milenina, R. Athimulama, M. Demanda, and B. Coenegrachtsb b Lam © IMECCONFIDENTIAL Add to Reading List Document Date: 2012-05-24 09:11:51 Open Document File Size: 755,60 KB Share Result on Facebook

Fluorocarbon-Based Passivation in STI Plasma Etching A.P. Milenina, R. Athimulama, M. Demanda, and B. Coenegrachtsb b Lam © IMECCONFIDENTIALAdd to Reading List