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Science / Measuring instruments / Semiconductor device fabrication / Ions / Thin film deposition / Plasma / Fourier transform ion cyclotron resonance / Ion / Static secondary-ion mass spectrometry / Chemistry / Mass spectrometry / Physics


DOE/ER[removed]DE85[removed]Technical Progress Report
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Document Date: 2002-07-26 12:24:58

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File Size: 979,63 KB

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Company

Comparison -mof Ab / /

IndustryTerm

metal process cluster / on chemical clusters / part technology / low energy ion beams / metal / bare metal cluster ions / metal cluster advantage / metal cluster / bare metal / decelleration energy / cold metal cluster species / elnzel energy / software reaction / visible work metal / beam technology / metal cluster area / metal clusters / reactor technology / rfquadrupole / a.metal beam / bare metal accord / electric energy / /

Organization

National Science Foundation / Technical Progress Report SUPERSONICMETAL CLUSTERBEAMS Department of Ene'rgy For Principal Period / United States Government / /

Person

M. A. Alford / Period Investigator / /

Technology

Spectroscopy / laser / one part technology / reactor technology / beam technology / /

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