![Chemistry / Semiconductor device fabrication / Inorganic compounds / Electronic engineering / Thin film deposition / High- dielectric / Transistors / Crystalline silicon / Wafer / Silicon on insulator / Atomic layer deposition / Gallium arsenide Chemistry / Semiconductor device fabrication / Inorganic compounds / Electronic engineering / Thin film deposition / High- dielectric / Transistors / Crystalline silicon / Wafer / Silicon on insulator / Atomic layer deposition / Gallium arsenide](https://www.pdfsearch.io/img/59d0243cf5eac3e517a1dd39d30ff40f.jpg) Date: 2008-09-08 15:02:12Chemistry Semiconductor device fabrication Inorganic compounds Electronic engineering Thin film deposition High- dielectric Transistors Crystalline silicon Wafer Silicon on insulator Atomic layer deposition Gallium arsenide | | Inside Front Cover: Defect Tolerance and Nanomechanics in Transistors that Use Semiconductor Nanomaterials and Ultrathin Dielectrics (Adv. Funct. Mater)Add to Reading ListSource URL: rogers.matse.illinois.eduDownload Document from Source Website File Size: 704,94 KBShare Document on Facebook
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