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Chemistry / Semiconductor device fabrication / Inorganic compounds / Electronic engineering / Thin film deposition / High- dielectric / Transistors / Crystalline silicon / Wafer / Silicon on insulator / Atomic layer deposition / Gallium arsenide
Date: 2008-09-08 15:02:12
Chemistry
Semiconductor device fabrication
Inorganic compounds
Electronic engineering
Thin film deposition
High- dielectric
Transistors
Crystalline silicon
Wafer
Silicon on insulator
Atomic layer deposition
Gallium arsenide

Inside Front Cover: Defect Tolerance and Nanomechanics in Transistors that Use Semiconductor Nanomaterials and Ultrathin Dielectrics (Adv. Funct. Mater)

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Source URL: rogers.matse.illinois.edu

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