Gas immersion laser doping

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1	letters to nature .............................................................. Ultrafast and direct imprint of nanostructures in silicon Stephen Y. Chou, Chris Keimel & Jian Gu Add to Reading List Source URL: www.princeton.edu Language: English* - Date: 2006-08-19 16:37:09 Technology Nanoimprint lithography Polycrystalline silicon Silicon Wafer Gas immersion laser doping Laser Excimer laser Ion laser Chemistry Semiconductor device fabrication Materials science