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Physics / Nature / Energy / Linear filters / Mechanics / Electrical components / Acoustics / Electromagnetism / Resonator / Cantilever / Aluminium nitride / Capacitor
Date: 2013-03-17 20:41:08
Physics
Nature
Energy
Linear filters
Mechanics
Electrical components
Acoustics
Electromagnetism
Resonator
Cantilever
Aluminium nitride
Capacitor

50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection

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Source URL: nano.caltech.edu

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