manufacturing error / chemical vapor deposition / energy conservation / fabrication algorithm / selective chemical etching / active and passive devices / chemical alteration / be achieved using either fabrication algorithm / /
Organization
National Sciences and Engineering Research Council / Sajeev John Department of Physics / Federal Communications Commission / U.S. Securities and Exchange Commission / University of Toronto / /
Person
Timothy Y. M. Chan / Eli Yablonovitch / JOHN FIG / Nicolas Tétrault / /