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Photonic crystal / Diffraction / Multiphoton lithography / Interference / Holography / Refractive index / Wavelength / Physics / Optics / Photonic metamaterial


PHYSICAL REVIEW E 73, 046610 共2006兲 Photonic band-gap formation by optical-phase-mask lithography Timothy Y. M. Chan, Ovidiu Toader, and Sajeev John Department of Physics, University of Toronto, 60 St. George Street
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Document Date: 2006-05-01 11:58:27


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File Size: 1,02 MB

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City

Toronto / Weinheim / /

Country

Canada / /

Currency

USD / /

Facility

University of Toronto / /

IndustryTerm

manufacturing error / chemical vapor deposition / energy conservation / fabrication algorithm / selective chemical etching / active and passive devices / chemical alteration / be achieved using either fabrication algorithm / /

Organization

National Sciences and Engineering Research Council / Sajeev John Department of Physics / Federal Communications Commission / U.S. Securities and Exchange Commission / University of Toronto / /

Person

Timothy Y. M. Chan / Eli Yablonovitch / JOHN FIG / Nicolas Tétrault / /

Position

Premier / /

Product

SU-8 / /

ProvinceOrState

Ontario / /

Technology

semiconductor / laser / lithography / x-ray / fabrication algorithm / polymerization / dielectric / chemical vapor deposition / /

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