chemical equilibrium code / chemical input / vibrational energy transfer processes / electron-density systems / semiconductor processing industry / elementary gas-phase chemical kinetics / free energy / chemistry systems / chemical production / electron-energy distribution function / energy conservation equation / software tools / software components / semiconductor processing / plasma systems / microelectronics processing / chemical destruction time / molecular gas / energy / large systems / input protocol / chemical reactions / multi-fluid plasma systems / chemical production rates / software implementation / chemical reaction mechanism / internal energy / gas constant / thermal systems / gas temperature / energy equations / separate electron energy equation / gas mixture / chemical kinetics / elementary chemical reactions / molar internal energy / activation energy / non-equilibrium multi-fluid systems / /
OperatingSystem
UNIX / /
Organization
U. S. Government / Plasma Processes Department / United States Government / Stanford University / National Aeronautics and Space Administration / /
Person
Richard Larson / Pauline Ho / Joseph Grcar / Kee / Mark Cappelli / Fran M. Rupley / Andrew Lutz / Gregory Smith / James A. Miller / Andrew Labun / Jong Shon / Michael Coltrin / Jan Hessler / Chris Moen / Harry Moffat / William Houf / Gregory Evans / /
Position
Landau-Teller / Interpreter / fi Species index Forward / analyst / CHEMKIN Interpreter / /
UC-405 SAND96-8216 Unlimited Release