Thin Solid Films[removed]–70 Quantitative modelling of nucleation kinetics in experiments for poly-Si growth on SiO2 by hot wire chemical vapor deposition Maribeth S. Mason*, Jason K. Holt, Harry A. Atwater Thoma

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Date: 2007-07-14 18:58:39 Materials science Nucleation Grain growth Epitaxy Surface diffusion Polycrystalline silicon Chemical vapor deposition Pulsed laser deposition Chemistry Semiconductor device fabrication Thin film deposition		Thin Solid Films[removed]–70 Quantitative modelling of nucleation kinetics in experiments for poly-Si growth on SiO2 by hot wire chemical vapor deposition Maribeth S. Mason*, Jason K. Holt, Harry A. Atwater Thoma Add to Reading List Source URL: daedalus.caltech.edu Download Document from Source Website File Size: 524,03 KB Share Document on Facebook

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