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| Document Date: 2013-01-22 14:56:17 Open Document File Size: 16,86 KBShare Result on Facebook
Facility National Institute of Standards and Technology / Mark W. Keller National Institute of Standards and Technology / / IndustryTerm carrier mobility approaching / eventual applications / mm chip / / Organization National Institute of Standards and Technology / / Person DAVID L. MILLER / Mark W. Keller / KYLE M. DIEDERICHSEN / / Technology 6 mm chip / CVD / Chemical vapor deposition / /
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