American Institute of Physics Downloaded / Harry A. Atwater Thomas J. Watson Laboratory of Applied Physics / California Institute of Technology / Kavli Nanoscience Institute / American Institute of Physics / /
IndustryTerm
telecommunications frequencies / photonics technology / chemical vapor deposition / active devices / /
Organization
Center for Science and Engineering of Materials / California Institute of Technology / American Institute of Physics / National Science Foundation / DARPA / Kavli Nanoscience Institute / Harry A. Atwater Thomas J. Watson Laboratory of Applied Physics / /
Person
Axel Scherer / Michael Shearn / Ryan M. Briggs / /
Position
Author / J. Archer for TEM assistance / polarization controller / /
ProvinceOrState
California / /
PublishedMedium
APPLIED PHYSICS LETTERS / /
Technology
laser / lithography / Si chip / Si photonics technology / chemical vapor deposition / fabricated using electron-beam lithography / /
APPLIED PHYSICS LETTERS 94, 021106 共2009兲 Wafer-bonded single-crystal silicon slot waveguides and ring resonators Ryan M. Briggs,a兲 Michael Shearn, Axel Scherer, and Harry A. Atwater Thomas J. Watson Laboratory of