Electronics Manufacturing Technical Support Document

First Page		Document Content
Date: 2012-08-30 14:49:16 Microtechnology Semiconductor device fabrication Microelectromechanical systems Greenhouse gas AP 42 Compilation of Air Pollutant Emission Factors Etching Epitaxy Hexafluoroethane Integrated circuit Technology Air pollution Materials science		Electronics Manufacturing Technical Support Document Add to Reading List Source URL: www.epa.gov Download Document from Source Website File Size: 864,23 KB Share Document on Facebook

	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 12, NO. 6, DECEMBERThermocapillary Actuation of Droplets on Chemically Patterned Surfaces by Programmable DocID: 1u77o - View Document
	Microsoft Word - 03-YCai_MEMSIC_CStudy_jw6_dh1_20081023.doc DocID: 1r6kx - View Document
	VG800 LOW DRIFT MEMS VERTICAL GYRO The MEMSIC VG800 establishes a new level of performance for standalone “unaided” inertial DocID: 1r3e5 - View Document
	Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography V. Singh1, J. Goettert1, O. Jinka1,2,* 1 Center for Advanced Microstructures and Devices (CAMD) DocID: 1qVW9 - View Document
	PRESS RELEASERUSNANO Exits from SiTime with Yield Above 25% RUSNANO is exiting its portfolio investment in SiTime Corporation (Sunnyvale, USA), which develops high-performance semiconductor chips using MEMS t DocID: 1qQgR - View Document