| Document Date: 2012-11-16 19:15:37
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City Kobe / / Company Osmonics’ Lab Inc / Dow Corning Inc. / High Aspect Ratio Polymer Micro/Nano-Structure Manufacturing / / Country Taiwan / Japan / United States / / / Facility Carnegie Mellon University / T. Dam / Robotics Institute / / IndustryTerm nano-manufacturing / aspect ratio polymer micro/nano-structure manufacturing / metal layer / large area manufacturing / possible novel manufacturing techniques / possible solution / nanostructures applications / manufacturing technique / higher aspect ratio manufacturing methods / micro-pore membrane site / manufacturing micro/nano-structures / manufacturing methods / silicone rubber / manufacturing techniques / surface energy / metal plate / silicone rubber micro/nano-bump structures / silicone rubber nanopyramids / upper metal plate / rubber / data-storage applications / silicone rubber nano-bumps / / Organization Mechanical Engineering and Robotics Institute / Carnegie Mellon University / Pittsburgh / / Person Ezgi Ergec / Matthew DeGioia / Nat / Ronald S. Fearing / M. Tormen / V / Gaurav Shah / / Position author / / Product Nanoembossing / / PublishedMedium Journal of Chemical Physics / Review of Scientific Instruments / / Technology 3-D / lithography / /
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To appear in the IEEE/ASME Advanced Mechatronics Conference, Kobe, Japan, July[removed]High Aspect Ratio Polymer Micro/Nano-Structure Manufacturing using Nanoembossing, Nanomolding and Directed Self-Assembly Metin Sitti