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Asian Journal of Control, Vol. 11, No. 2, pp[removed], March 2009 Published online in Wiley InterScience (www.interscience.wiley.com) DOI: [removed]asjc.090 HIGH-SPEED SERIAL-KINEMATIC SPM SCANNER: DESIGN AND DRIVE CONSID
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Document Date: 2012-04-05 18:20:50
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Asian Journal of Control, Vol. 11, No. 2, pp[removed], March 2009 Published online in Wiley InterScience (www.interscience.wiley.com) DOI: [removed]asjc.090 HIGH-SPEED SERIAL-KINEMATIC SPM SCANNER: DESIGN AND DRIVE CONSID