![](https://www.pdfsearch.io/img/9221d2691bd75f8bfae96025d61c6393.jpg) Date: 2015-04-22 08:46:33
| | Investigation and optimization of the magnetic field configuration in high-power impulse magnetron sputteringAdd to Reading ListSource URL: cpmi.illinois.eduDownload Document from Source Website File Size: 2,81 MBShare Document on Facebook
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