Linköping University / Biology Linköping University / /
IndustryTerm
metal oxide films / metal / metal mode / gas rarefaction effects / low oxygen gas flow / ion energy distributions / metal oxide thin films / metal oxides / gas rarefaction / gas phase / ion energy / oxygen gas flow rate / /
Organization
Swedish Research Council / Plasma & Coatings Physics Division / Linköping University / Metal Oxides Montri Aiempanakit Plasma & Coatings Physics Division Department of Physics / Physics / Chemistry and Biology Linköping University / Ministry of Science and Technology / Department of Physics / Chemistry and Biology / Strategic Research Center / /
Reactive High Power Impulse Magnetron Sputtering of Metal Oxides