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Mass spectrometry / Coatings / Materials science / Thin film deposition / Astrophysics / Sputter deposition / Sputtering / Plasma / Ion / Chemistry / Physics / Science
Date: 2014-12-11 20:16:40
Mass spectrometry
Coatings
Materials science
Thin film deposition
Astrophysics
Sputter deposition
Sputtering
Plasma
Ion
Chemistry
Physics
Science

The occurrence of Ti4+ ions in a high power impulse magnetron sputtering plasma

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