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Nuclear Instruments and Methods in Physics Research B–363 www.elsevier.com/locate/nimb Proton beam writing of microstructures in silicon M.B.H. Breese a
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Document Date: 2013-02-01 05:12:08
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Nuclear Instruments and Methods in Physics Research B–363 www.elsevier.com/locate/nimb Proton beam writing of microstructures in silicon M.B.H. Breese a