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Extreme ultraviolet lithography / Extreme ultraviolet / Hydrogen silsesquioxane


EUV ERC Overview: Compact Coherent EUV Sources Tabletop EUV Lasers Milliwatt average power at 47nm • High Average Brightness
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Document Date: 2010-04-12 14:10:06

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File Size: 4,32 MB

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Continent

Europe / /

Country

United States / /

Currency

USD / /

IndustryTerm

source technologies / large semiconductor manufacturer / printing / /

Organization

National Science Foundation / /

Product

Laser / /

Technology

semiconductor / source technologies / spectroscopy / Laser / Lithography / Integrated Circuit / Lasers / /

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