Back to Results
First PageMeta Content
Mechanical engineering / Physical quantities / Heat conduction / Chemical engineering / Thermodynamics / Thermal conductivity / R-value / Relaxation / Thermal conduction / Heat transfer / Chemistry / Physics


APPLIED PHYSICS LETTERS 98, 063107 共2011兲 Influence of gas rarefaction on the lateral resolution achievable by thermocapillary patterning Nan Liu and Sandra M. Troiana兲 California Institute of Technology, 1200 E.
Add to Reading List

Document Date: 2011-02-09 14:12:11

Open Document

File Size: 240,58 KB

Share Result on Facebook

City

Washington / D.C. / Berlin / Pasadena / New York / Oxford / /

Company

Princeton University Press / Knudsen / /

Country

United States / /

Currency

USD / /

/

Facility

American Institute of Physics Downloaded / California Institute of Technology / American Institute of Physics / /

IndustryTerm

gas rarefaction effects / gas rarefaction leads / ␭gas / manufacturing costs / gas rarefaction / proximity correction algorithms / rarefied gas / gas layer thickness / confined gas / fewer processing steps / cooler gas temperatures / warmer gas temperatures / gas phase / gas layer / /

Organization

California Institute of Technology / American Institute of Physics / National Science Foundation / Universität Konstanz / Princeton University / /

Person

Sandra M. Troiana / T. J. Watson Sr. / Nan Liu / Grant Nos / /

ProvinceOrState

New York / California / /

PublishedMedium

APPLIED PHYSICS LETTERS / /

TVStation

CBET / /

Technology

semiconductor / radiation / proximity correction algorithms / Heat Transfer / lithography / simulation / /

URL

http /

SocialTag