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“Application of thin-films to MEMS” Prof. João Pedro Conde Department of Chemical and Biological Engineering / Instituto Superior Tecnico and INESC Microsistemas e Nanotecnologias, Rua Alves Redol, Lisbon
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Document Date: 2012-05-16 09:18:20
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“Application of thin-films to MEMS” Prof. João Pedro Conde Department of Chemical and Biological Engineering / Instituto Superior Tecnico and INESC Microsistemas e Nanotecnologias, Rua Alves Redol, Lisbon