A DECADE OF SOLID STATE PULSED POWER DEVELOPMENT AT CYMER INC. R. Ness, P. Melcher, G. Ferguson, and C. Huang Cymer Inc., 17075 Thornmint Court, San Diego, CA 92127, USA Abstract

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Date: 2008-11-08 13:32:49 Power electronics Pulsed power Power supply Capacitor Extreme ultraviolet lithography Transformer Insulated gate bipolar transistor Electronic test equipment Radio electronics Electrical engineering Electromagnetism Technology		A DECADE OF SOLID STATE PULSED POWER DEVELOPMENT AT CYMER INC. R. Ness, P. Melcher, G. Ferguson, and C. Huang Cymer Inc., 17075 Thornmint Court, San Diego, CA 92127, USA Abstract Add to Reading List Source URL: www.nessengr.com Download Document from Source Website File Size: 334,91 KB Share Document on Facebook

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