![Physics / Microfluidics / Nanotechnology / Microtechnology / Biotechnology / Microelectromechanical systems / Fluidics / Integrated circuit / Packaging and labeling / Technology / Materials science / Fluid dynamics Physics / Microfluidics / Nanotechnology / Microtechnology / Biotechnology / Microelectromechanical systems / Fluidics / Integrated circuit / Packaging and labeling / Technology / Materials science / Fluid dynamics](https://www.pdfsearch.io/img/08936a2726cb296869178c5b289c151c.jpg)
| Document Date: 2009-05-30 14:26:56 Open Document File Size: 1,22 MBShare Result on Facebook
City Semiconductor / Boston / Biopolymer / / IndustryTerm microelectromechanical systems / bioMEMS devices / microfluidic devices / bioMEMS device / biopolymer-based bioMEMS devices / / NaturalFeature µm Microfluidic channel / / Organization Reproducible Assembly / American Vacuum Society / Lab on a Chip / / Person Jung Jin Park / Gary Rubloff / Theresa Valentine / Greg Payne / Reza Ghodssi / / ProgrammingLanguage LabView / / ProvinceOrState Massachusetts / / PublishedMedium Lab on a Chip / / Technology semiconductor / microelectromechanical systems / lithography / MEMS / Lab on a Chip / Flow Control / Photolithography / /
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