Nikon / Scan- C 2007 Wiley-VCH Verlag GmbH & Co. KGaA / B. E. Deal A. S. / Philips / Airgas / mechani- C 2007 Wiley-VCH Verlag GmbH & Co. KGaA / Fannie / Hertz / C 2007 Wiley-VCH Verlag GmbH & Co. KGaA / Microsoft / / /
Facility
Mechanical Engineering Massachusetts Institute of Technology / MIT Deshpande Center / /
IndustryTerm
homogeneous gas-phase reactions / metal / gas tanks / plastics / stainless steel / catalytic chemical vapor deposition / stable and unstable products / gas-phase / still-camera imaging / derivative products / gas chromatography / dedicated gas pretreatment / manufacturing process control / Digital imaging / chemical vapor deposition / reaction products / Chemical simulation / optical imaging / ubiquitous and easy-to-use systems / chemical species / reactant gas / imaging / gas cools / carrier gases / gas-phase decomposition / camera equipment / /
Organization
MIT Deshpande Center for Technological Innovation / National Science Foundation / Massachusetts Institute of Technology / A. H. Slocum Department / /
Person
Rick Slocum / A. H. Slocum / M. G. Chapline / A. J. Hart / / /
Position
author / /
Product
Franklin / /
ProvinceOrState
Colorado / /
Technology
laser / Digital imaging / gas chromatography / simulation / process control / CVD / chemical vapor deposition / /