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Control of the Receding Meniscus in Immersion Lithography H. Burnett, T. Shedd,∗ G. Nellis, M. El-Morsi, and R. Engelstad Computational Mechanics Center, University of Wisconsin, 1513 University Ave., Madison, WI 53706
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Document Date: 2005-08-10 21:14:02
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Control of the Receding Meniscus in Immersion Lithography H. Burnett, T. Shedd,∗ G. Nellis, M. El-Morsi, and R. Engelstad Computational Mechanics Center, University of Wisconsin, 1513 University Ave., Madison, WI 53706