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Microtechnology / Extreme ultraviolet lithography / Nanolithography / Interference lithography / Electron beam lithography / Photolithography / Nanotechnology / Photoresist / Extreme ultraviolet / Materials science / Technology / Chemistry


PAUL SCHERRER INSTITUT Technology Transfer R&D Services
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Document Date: 2014-11-28 07:19:08

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City

SYN / /

Company

PSI’s Laboratory / Eulitha AG / /

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IndustryTerm

nanostructured products / plasmonic biosensing applications / e-beam / direct-write electron-beam lithography tool / magnetic media / 5000Plus direct-write tool / parallel printing / energy / /

Organization

PAUL SCHERRER INSTITUT Technology Transfer R&D Services High-Resolution Lithography Serial / Paul Scherrer Institut / /

Person

PAUL SCHERRER / Vitaliy Guzenko / Harun Solak / /

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Technology

semiconductor / radiation / Lithography / photolithography / /

URL

www.eulitha.com / www.psi.ch / /

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