Back to Results
First PageMeta Content
Nanoimprint lithography / Nanolithography / Nanotechnology / Photolithography / Electron beam lithography / Interference lithography / Lithography / Microelectromechanical systems / Microfabrication / Materials science / Technology / Microtechnology


PAUL SCHERRER INSTITUT Technology Transfer R&D Services
Add to Reading List

Document Date: 2014-11-28 07:19:08

Open Document

File Size: 429,78 KB

Share Result on Facebook

City

Windisch / SYN / /

Company

INKA / Contact Martin Bednarzik Laboratory / /

Country

Switzerland / /

/

Facility

Consulting The Laboratory of Micro / Institute of Polymer Nanotechnology INKA / The Laboratory / Paul Scherrer Institute / University of Applied Sciences Nordwestschweiz / /

IndustryTerm

metal / metal stamps / definition systems / e-gun / process technology / microand nanofabrication technologies / process equipment / injection molding tools / chemical vapor deposition system / thin-film technology / target sputtering systems / bump-bond technology / hot embossing equipment / production-type equipment / transfer systems / fabrication technologies / /

Organization

PSI / Institute of Polymer Nanotechnology INKA / Laboratory of Micro / PAUL SCHERRER INSTITUT Technology Transfer R&D Services Micro / Laboratory for Micro / University of Applied Sciences Nordwestschweiz / Paul Scherrer Institute / /

Person

PAUL SCHERRER / /

/

Product

F18 / /

Technology

56 310 25 20 martin.bednarzik@psi.ch Technology / Laser / fabrication technologies / BMP / chemical vapor deposition system / X-ray / microand nanofabrication technologies / Leica Au sputterer Nano-Imprint Technology / tomography / Tepla plasma asher Thin-film technology / thin-film technology / bump-bond technology / lithography / process technology / Photolithography / CVD / Nanopore chips / /

URL

www.psi.ch / /

SocialTag