Berlin / Ion Sources Taormina / Chemnitz / Taormina / New York / /
Company
AIP Press / Building Systems / Renewable Energy / Kühn2 1 Ernest Orlando Lawrence Berkeley National Laboratory / /
Country
Germany / Italy / /
Facility
Institute of Physics / Chemnitz University / Building Technology / University of California / Technical University of Chemnitz / /
IndustryTerm
process gas / low-energy constricted-plasma source / gas flow / stagnant gas / low energy / gas flow pass / discharge gas / kinetic energy / gas flow rate / thin films systems / energy measurements / ion energy distribution / higher energy / ion energy distributions / high gas flow rates / low ion energy / low energy ions / ionized gas atoms / energy distribution / gas atoms / resolved energy measurements / energy / /
Organization
Technical University of Chemnitz / U.S. Department of Energy / University of California / Berkeley / Institute of Physics / /
Person
Constricted Plasma Sources / Michael Dickinson / Rainer Pintaske / Thomas Welzel / Siegfried Peter / Michael Rubin / Ion Beam / Ion Sources / /
LBNL[removed]UC-426 presented at the 7th International Conference on Ion Sources Taormina, Italy, September 7-13, 1997 and