| Document Date: 2014-03-21 16:12:51
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IndustryTerm manufacturing steps / potential technical solutions / coupled simulation tools / simulation tools / technology development / appropriate simulation tool / materials structural simulation tools / supported software environments / lithography equipment / technology requirements / technology arena / software investments / software vendors / manufacturing / Numerical algorithms / simulation food chain / chip performance tools / active devices / software houses / imaging / lithography simulation tool / software tools / individual equipment/feature scale simulation tools / plasma-etching tool / supported simulation tools / / Technology semiconductor / lithography / 1 MODELING AND SIMULATION SCOPE Technology / SIMULATION / dielectric / CMP / /
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INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION