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Ions / Matter / Semiconductor device fabrication / Plasma physics / Ion source / Plasma / Reactive-ion etching / Ion gun / Sputtering / Chemistry / Physics / Plasma processing


IonEtch Sputter Ion Gun, GenII The tectra IonEtch ion gun is a filamentless ion source based on a microwave plasma discharge. The IonEtch works by coupling microwave energy into a coaxial waveguide and from there via eva
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Document Date: 2010-10-02 06:51:58

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City

Frankfurt / /

Company

tectra GmbH / Plasma Source Water Cooling 295 175 tectra GmbH / /

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IndustryTerm

metal / microwave energy / gas dependant / hot metal electrodes / gas flow / gas load / Typical applications / energy dependant / /

Person

Leak Valve / Mounting Flange / /

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Position

mass flow controller / /

Technology

microwave / dielectric / /

URL

www.tectra.de / /

SocialTag