| Document Date: 2014-01-21 09:33:28 Open Document File Size: 1,49 MBShare Result on Facebook
City Washington DC / Burlington / / Company roughened Ag / PEALD Ag / COMSOL Inc. / AIP Publishing / USA Laboratory / / Country United States / Finland / / Currency USD / / / Facility University of Helsinki / American Institute / American Institute of Physics / / IndustryTerm metal / metal shell/dielectric / energy dispersive x-ray / metal nanoparticles1 / e-beam / / NaturalFeature Ag islands / / Organization American Institute of Physics / University of Helsinki / Naval Research Lab / / Person Park / Josh D. Caldwell / Mikko Ritala / S. M. Prokes / Erin Cleveland / Edward Foos / / Position Author / Executive / DeltaNu Reporter / / PublishedMedium Inorganic Chemistry / Applied Physics Letters / / Region New England / / Technology laser / x-ray / dielectric / lithography / / URL http /
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