![](https://www.pdfsearch.io/img/098f3f4fabd326139f722e35176a1c73.jpg) Date: 2014-07-25 14:43:36
| | Journal of Undergraduate Research 7, Atomic Layer Deposition of Zirconium Oxide on Copper Patterned Silicon Substrate Jaya Parulekar Department of Chemical and Biological Engineering, Illinois Institute of Add to Reading ListSource URL: jur.phy.uic.eduDownload Document from Source Website File Size: 392,10 KBShare Document on Facebook
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