Toggle navigation
PDFSEARCH.IO
Document Search Engine - browse more than 18 million documents
Sign up
Sign in
Back to Results
First Page
Meta Content
View Document Preview and Link
Loss of implanted heavy elements during annealing of ultra-shallow ion-implanted silicon: The complete picture
Add to Reading List
Document Date: 2014-08-08 03:45:28
Open Document
File Size: 1,47 MB
Share Result on Facebook
UPDATE
Loss of implanted heavy elements during annealing of ultra-shallow ion-implanted silicon: The complete picture