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Technology / Chemistry / Photolithography / Etching / Wafer / Photoresist / Hazardous waste / Resist / Waste / Semiconductor device fabrication / Materials science / Microtechnology


COVER: The cover page was designed by Joanna Kruckenberg, California Environmental Protection Agency, Department of Toxic Substances Control, Office of Pollution Prevention and Technology Development. The image was adop
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Document Date: 2006-11-14 17:21:19


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File Size: 1,52 MB

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Company

Microsemi / NEC / Skyworks / SEMICONDUCTOR FABRICATION PROCESS Semiconductors / Novellus Systems / Micrel / MEMC Electronic Materials Incorporated. / Intel / Agilent / /

Event

Product Issues / Reorganization / /

IndustryTerm

solvent-based chemical / hazardous waste management / oxidant gas / source reduction technologies / chemical developers / manufacturing facilities / manufacturing / pace technology development / spin track tool / manufacturing processes / manufacturing process / /

Organization

office of Pollution Prevention / Department of Toxic Substances Control / office of Pollution Prevention and Technology Development / California Environmental Protection Agency / Department of Toxic Substances Control office of Pollution Prevention and Technology Development / /

Person

Pat Miles-Lopez / Alan Ingham / Elmer Shell Solar Sipex / /

Position

inspector / Technology Development ACKNOWLEDGEMENTS The author / /

Product

Hazardous Waste Tracking System / debris / WASTE SOURCE REDUCTION ASSESSMENT REPORT Prepared / Waste Tracking System / /

ProvinceOrState

California / /

Technology

source reduction technologies / semiconductors / semiconductor devices / PHOTOLITHOGRAPHY / integrated circuits / integrated circuit / /

SocialTag