HIGHLY SPACE-EFFICIENT ELECTROSTATIC ZIGZAG TRANSMISSIVE MICRO-OPTIC SWITCHES FOR AN INTEGRATED MEMS OPTICAL DISPLAY SYSTEM Kerwin Wang1, Karl F. Böhringer1, Mike Sinclair2, and Gary Starkweather2 of Washington, Seattle

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Date: 2003-08-07 23:33:00 Microelectromechanical systems Deformable mirror Microlens Micro-Opto-Electro-Mechanical Systems Comb drive Shutter Grating light valve Time-multiplexed optical shutter Microtechnology Materials science Technology		HIGHLY SPACE-EFFICIENT ELECTROSTATIC ZIGZAG TRANSMISSIVE MICRO-OPTIC SWITCHES FOR AN INTEGRATED MEMS OPTICAL DISPLAY SYSTEM Kerwin Wang1, Karl F. Böhringer1, Mike Sinclair2, and Gary Starkweather2 of Washington, Seattle Add to Reading List Source URL: www.ee.washington.edu Download Document from Source Website File Size: 816,75 KB Share Document on Facebook