Back to Results
First PageMeta Content
Radiometry / Spectroscopy / Semiconductor device fabrication / Particle detectors / Sensors / Ellipsometry / Sputtering / Kinetic inductance detector / Kinetic inductance / Physics / Matter / Chemistry


Characterization and In-situ Monitoring of Sub-stoichiometric Adjustable TC Titanium Nitride Growth arXiv:1209.4626v1 [cond-mat.supr-con] 20 Sep[removed]Michael R. Vissers,∗ Jiansong Gao, Jeffrey S. Kline, Martin Sandber
Add to Reading List

Document Date: 2014-05-05 14:02:28


Open Document

File Size: 522,29 KB

Share Result on Facebook

City

London / /

Company

Thin Solid Films / /

Country

Germany / United States / /

/

Facility

Saint Louis University / Karlsruhe Institute of Technology / Keck Institute / David P. Pappas§ National Institute of Standards and Technology / /

IndustryTerm

requisite energy / metal / unscreened plasma energy / astronomical applications / gas flow / photon energy / typical applications / gas ratio / observable energy range / carrier density / search desire detection / gas mixture / vs photon energy / astronomical detector applications / energy / /

Organization

National Institute of Standards and Technology / U.S. government / Institute of Technology / National Aeronautics and Space Administration / Keck Institute for Space Studies / Department of Physics / Saint Louis University / /

Person

Martin P. Weides / † David / Jeffrey S. Kline / David S. Wisbey / Henry Leduc / Martin Sandberg / David P. Pappas / Michael R. Vissers / ∗ Jiansong / Jonas Zmuidzinas / /

Position

mass flow controller / /

ProgrammingLanguage

DC / /

ProvinceOrState

Missouri / /

PublishedMedium

Physica B / Surface and Interface Analysis / Journal of Applied Physics / /

Technology

Surface Coatings Technology / X-ray / dielectric / microwave / process control / /

SocialTag