B.C. Jacquot S.P. / Si 10000 Counts HfO2 8000 6000 4000 Hf / Novellus Systems / Si 12000 Sputtered Hf / PEALD Hf / Si PEALD Hf / /
Facility
R. Leduc Jet Propulsion Laboratory/California Institute of Technology E. Hamden / University of Colorado Patrick Morrissey / University M. Beasley / Christopher Martin California Institute of Technology / /
IndustryTerm
chemical process / iALD / fabricated devices / /
Movie
Wavelength / /
MusicGroup
M.E. / /
Organization
University of Colorado / California Institute of Technology / Columbia University / S. Nikzad P. Day and R. Leduc Jet Propulsion Laboratory/California Institute of Technology E. Hamden / /
Person
Frank Greer / Al Al Al Al Al Al Al Al / Carol Garland / /
Atomically precise surface and interface engineering via atomic layer deposition to enable high-performance materials, detectors, and instruments F. Greer, M.E. Hoenk, T.J. Jones, B.C. Jacquot, M. Dickie, S. Monacos, and