Santa Clara / Sonic City / Omiya / Hawthorne / Bradford / Albuquerque / Augsburg / Colorado Springs / Washington / San Jose / Everett / Berlin / Cambridge / M. / /
Company
Lambda Physik / Uwe Stamm Lambda Physik AG / Naval Research Laboratory / ASML / Karl S / Canon / Japan Steel Works / Avco Everett Research Laboratory / IBM / Nikon / Matsushita / Siemens AG / Zeiss / Sandia Laboratories / Large-Area Electronics / Lambda Steel / /
Country
Japan / United Kingdom / Germany / United States / Singapore / /
Currency
pence / /
Facility
Matsushita Research Institute of Technology / Max-Planck Institute / HaloSafe reactor / Prof. Fritz Sch¨fers laboratory / University of Cambridge / University G¨ttingen / Avco Everett Research Laboratory / Kansas State University / /
IndustryTerm
energy levels / widespread applications / nm technology / scientific applications / potential energy curve / basic technologies / 2P rare gas positive ion / excimer lasers as commercial devices / semiconductor chip / electrical energy efficiently / optics manufacturer / main gas discharge leading / system software / rare gas monohalide / excimer laser applications / vacuum technology / energy / basic research applications / gas lifetime / laser tube technology / higher pulse energy / stable mounting technology / scale manufacturing / buffer gas / higher energy stability / laser chamber technology / medical and industrial applications / pulsed power technology / manufacturing / manufacturing tools / gas handling system / laser manufacturer / long gas lifetime / nm laser technology / Different applications / higher dose energy stability / improved energy stability / low energy / energy level / basic excimer laser technology / pulse energy stability / gas processors / transverse excitation gas laser discharge system / metal parts / main driving applications / nano-technologies / laser key technologies / industrial manufacturing environment / Pulse energy / increased laser gas lifetime / external gas supply / gas generators / excimer technology / halogen gas generator system / micro-electro-mechanical systems / halogen gas supply / gas generator produce / energy storage / halogen gas installation / rare gas monohalides / metal/ceramic laser chamber construction / excimer laser technology / microfabrication applications / industrial applications / pulse-to-pulse and long term energy stability / nm production tools / heart technology / energy detection / potential research applications / rst industrial applications / energy stability / pre-ionization technology / gas installation / chip manufacturing / mask inspection systems / high purity gas suppliers / gas lasers / early systems / stabilization hardware / excimer laser scanner technology / aggressive chemicals / rare gas halides / gas lifetime requirements / established lithography technology / /
Organization
Institute of Technology in Japan / Max-Planck Institute / University of Cambridge / Kansas State University / /
Person
Fritz Sch¨fer / T. Schroeder / Dirk Basting / H. S. Albrecht / V / N. G. Basov / V / Klaus Pippert / A. Vinokhodov / V / Peter Sorokin / Oskar Glemser / Bernd Steyer / I. Bragin / V / A. Demin / V / /
Position
General / example representative / conductor / CoO / /
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