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Laser science / Physics / Free spectral range / Optical cavity / Fabry / Filter / Wavelength-division multiplexing / Microelectromechanical systems / Optics / Fabry–Pérot interferometer / Technology


Performance Limits of a Micromachined Tunable-Cavity Filter Jung-sik Moon and Andrei M. Shkel Microsystems Laboratory, Department of Mechanical and Aerospace Engineering University of California, Irvine, CA 92697, USA jm
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Document Date: 2014-04-30 17:43:39


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File Size: 281,17 KB

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Perot / ANSYS / Andrei M. Shkel Microsystems Laboratory / /

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Facility

Aerospace Engineering University of California / /

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technology offers / optical measurement devices / tunable device / versatile device / fabrication technology / research / technology affect performance / light modulating applications / reduced processing steps / /

Organization

FR FD / University of California / Irvine / /

Technology

MEMS technology / MEMS / simulation / fabrication technology / lter using MEMS technology / dielectric / DWDM / /

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