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[removed][removed]How to effectively evaluate a direct laser lithography system Dong-Ik Kim, Hyug-Gyo Rhee, and Geon Hee Kim Measurement uncertainty quantifies performance-related doubt and
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Document Date: 2015-02-26 09:24:16

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File Size: 592,86 KB

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City

Institute Daejeon / /

Company

National Physical Laboratory / /

Country

Korea / South Korea / /

Facility

Space Optics Korea Research Institute of Standards / /

IndustryTerm

fabricated products / line-fitting algorithm / /

Organization

Geon Hee Kim Division / South Korea Hyug-Gyo Rhee Center / Space Optics Korea Research Institute of Standards and Science Daejeon / /

Person

Dong-Ik Kim / Hee Kim / /

Position

writing head / Author Information Figure / autofocus controller / /

Region

South Korea / /

Technology

laser / line-fitting algorithm / lithography / lithography system / /

URL

http /

SocialTag