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Semiconductor device fabrication / Thin film deposition / Chemical elements / Refractory metals / Transition metals / Reflection high-energy electron diffraction / Sputter deposition / Lattice constant / Niobium / Physics / Matter / Chemistry


RHEED Image Analysis on Epitaxial Niobium Thin Films T. Lahlou4, D. Beringer1, C. Clavero 2, J. Vazquez1 and R. A. Lukaszew1,2 C. Reece3, L. Phillips3, X. Zhao3 and A-M. Valente-Feliciano3 1Department 2Department
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Document Date: 2011-03-16 13:41:14


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File Size: 3,05 MB

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City

Newport News / Williamsburg / /

Company

RRR Thin Films / Thin Solid Films / /

Facility

College of William / Jefferson National Accelerator Facility / /

IndustryTerm

activation energy / energy electron diffraction formation / /

Organization

College of William & Mary / /

Person

George Mason / /

ProvinceOrState

Virginia / /

Technology

Image processing / radio frequency / /

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