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Water makes wires even more nano: Lab extends meniscus-mask process to make sub-10 nanometer paths
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Document Date: 2015-05-03 17:08:50
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File Size: 371,85 KB
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Facility
Richard E. Smalley Institute /
Rice University /
/
IndustryTerm
electronic devices /
sacrificial metal mask /
fabrication technology /
fabrication protocols /
/
Organization
American Chemical Society /
Air Force office of Scientific Research /
Rice's Richard E. Smalley Institute for Nanoscale Science and Technology /
Rice University /
Rice /
/
Person
Alexander Slesarev /
James Tour /
Vera Abramova /
/
Position
professor of materials science /
chemist /
/
Technology
semiconductor /
lithography /
fabrication technology /
integrated circuits /
fabrication protocols /
integrated circuit /
/
URL
www.tcpdf.org /
http /
SocialTag
Nanoelectronics
Nanowire
Semiconductor device fabrication
Etching
Integrated circuit
Silicon
Titanium dioxide
Local oxidation nanolithography
Chemistry
Materials science