![](https://www.pdfsearch.io/img/7d5cdbce66c9d1ccfb3092cf02e14689.jpg) Date: 2013-02-12 08:39:15
| | SISPAD 2012, September 5-7, 2012, Denver, CO, USA Simulations of Local Oxidation Nanolithography by AFM Based on the Generated Electric Field L. Filipovic∗† and S. Selberherr∗ ∗ InstituteAdd to Reading ListSource URL: in4.iue.tuwien.ac.atDownload Document from Source Website File Size: 216,74 KBShare Document on Facebook
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