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DEVELOPMENT OF RIBBON ION BEAM SOURCE AND TRANSPORT SYSTEM FOR INDUSTRIAL APPLICATIONS E.S. Masunov1, S.M. Polozov1, T.V. Kulevoy2, R.P. Kuibeda2, V.I. Pershin2, S.V. Petrenko2, D.N. Seleznev2, I.M. Shamailov1, A.L. Sitn
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Document Date: 2008-10-15 10:15:54
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DEVELOPMENT OF RIBBON ION BEAM SOURCE AND TRANSPORT SYSTEM FOR INDUSTRIAL APPLICATIONS E.S. Masunov1, S.M. Polozov1, T.V. Kulevoy2, R.P. Kuibeda2, V.I. Pershin2, S.V. Petrenko2, D.N. Seleznev2, I.M. Shamailov1, A.L. Sitn