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Systems theory / Control theory / Linear stage / Motion control / Systems engineering / Technology / Science


Control strategies for a dynamic positioning machine at nanometer level
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Document Date: 2014-09-03 02:31:01


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File Size: 361,23 KB

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City

Charlotte / /

Country

United Kingdom / Singapore / /

Facility

University of Warwick Charlotte Coventry / Singapore Institute of Manufacturing Delft University / The University of North Carolina / /

IndustryTerm

pick-and-place tool / probe systems / measurement systems / /

Organization

Singapore Institute / School of Engineering / University of Warwick / Delft University of Technology / European Society of Precision Engineering and Nanotechnology / National Science Foundation / Center for Precision Metrology / MIT / University of North Carolina / US Federal Reserve / American Society for Precision Engineering / /

Person

David Otten / David Trumper / /

Position

author / combined controller / separate controller / short range motion controller / switchable controller / long range stage controller / short range stage controller / CONTROLLER / linear y-axis controller / /

ProvinceOrState

North Carolina / /

Technology

laser / /

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